SiC chips are widely used in environments that require high power, high frequency, and high temperature performance. For general SEM defect inspection, due to the semi-transparent physical properties of SiC wafers, it is necessary to and optimise pre-aligner during inspection process, as well as provide an optimized robotic system. Chainsem has been developing in this field for over 10 years and has successfully installed 5 systems at customer sites so far. With our accumulated experience and unique technology, we are confident in our ability to meet your needs.

．Upper Column contamination

Materials deposition will decrease the isolation capability significantly which will result high column current leakage, and cause SEM image instable or disappeared.

．Lower column vacuum leakage

Materials cracking happens inside the lower column which will result in the failure of main chamber vacuum.

．You should know -

In AMAT, the solution of these two issues is to replace the whole column.

ChainSEM owns the exclusive technique to fix 90% of both issues. - Cost saving

SDD ( Silicon Drift Detector ) - It uses the advanced sensor chips, new electronics and innovative packaging to deliver the high quality EDX performance Serviceability Advantage

．No periodic maintenance for cooling system

．No gas-base(PT-14) refrigerator

．No separate vacuum chamber, no bake-out process.

．Short recovery / power-up time

．Lighter (2kg vs. 11kg)

Performance Advantage

．Higher count rate per second (about 4~6 times higher than SiLi detector)

．Capability at Tilt 0 (EDX analysis at 0 degree, and save time, skip tilt 45)

You should know -

．30+ SDDs installed worldwide by ChainSEM.

．In AMAT, no SDD option for your legacy SEMVision. (CX,G2,G3,G4)

．The minimum changes in your system - EDX detector upgrade only.

In addition to providing repair services, one of the company’s core businesses is offering SEM turnkey solutions for semiconductor manufacturers around the world. This includes recommending suitable SEM models, discussing acceptance criteria, completing Tier 2 installation, and providing follow-up training courses. We deliver comprehensive services to ensure our customers have complete peace of mind.

To support customers with factory expansions and operational needs, Chainsem offers relocation and disassembly/reassembly services. To date, we have completed over 30 projects, not only for clients in Taiwan but also for major semiconductor manufacturers across Asia. We use standard locking kits for disassembly, and during reinstallation, we follow either the current system condition or the AMAT acceptance criteria to meet customer requirements. This ensures a seamless transition, allowing customers to operate their original equipment smoothly at the new site.

To accommodate customers’ operational needs, Chainsem also offers SEM system conversion services from 8-inch to 12-inch. To date, we have completed over 12 such projects. In addition to modifying the load port design, the end-effector is also replaced as needed based on actual conditions, enabling broader applications for the original SEM system.